JPS6364032U - - Google Patents

Info

Publication number
JPS6364032U
JPS6364032U JP15853286U JP15853286U JPS6364032U JP S6364032 U JPS6364032 U JP S6364032U JP 15853286 U JP15853286 U JP 15853286U JP 15853286 U JP15853286 U JP 15853286U JP S6364032 U JPS6364032 U JP S6364032U
Authority
JP
Japan
Prior art keywords
cleaning
developer
developing device
liquid tank
photoresist film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15853286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15853286U priority Critical patent/JPS6364032U/ja
Publication of JPS6364032U publication Critical patent/JPS6364032U/ja
Pending legal-status Critical Current

Links

JP15853286U 1986-10-15 1986-10-15 Pending JPS6364032U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15853286U JPS6364032U (en]) 1986-10-15 1986-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15853286U JPS6364032U (en]) 1986-10-15 1986-10-15

Publications (1)

Publication Number Publication Date
JPS6364032U true JPS6364032U (en]) 1988-04-27

Family

ID=31082109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15853286U Pending JPS6364032U (en]) 1986-10-15 1986-10-15

Country Status (1)

Country Link
JP (1) JPS6364032U (en])

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5655048A (en) * 1979-10-11 1981-05-15 Matsushita Electric Ind Co Ltd Developing method and device therefor
JPS62102534A (ja) * 1985-10-29 1987-05-13 Kurotani Nobuko 半導体材料の処理装置
JPS62269316A (ja) * 1986-05-19 1987-11-21 Kurotani Iwao 半導体材料の現像処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5655048A (en) * 1979-10-11 1981-05-15 Matsushita Electric Ind Co Ltd Developing method and device therefor
JPS62102534A (ja) * 1985-10-29 1987-05-13 Kurotani Nobuko 半導体材料の処理装置
JPS62269316A (ja) * 1986-05-19 1987-11-21 Kurotani Iwao 半導体材料の現像処理装置

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